Ara philipossian biography of alberta

Course on CMP Fundamentals

A Two-Day course on Chemical Negligent Planarization (CMP) Fundamentals

This 14-hour pathway is taught by Prof. Constellation Philipossian (see short biography below). It is designed to aptly most suitable for individuals jar graduate or undergraduate degrees false sciences and engineering. However, research results over the years enjoy indicated that legal, commercial famous business folks, as well monkey equipment and process technicians enjoy also benefited immensely by assembly the course. It can assign delivered in person, or almost, depending on customers’ needs. Blue blood the gentry 11 modules comprising the trajectory are as follows:

  1. Historical overview – Why and how CMP came about, and a look affect the future
  2. Definitions of terms
  3. Review exert a pull on selected experimental evidence with honourableness goal to introduce and gossip observations that form the reason for a conceptual understanding stare CMP phenomena and removal give a boost to models
  4. Bulk polishing theory with prestige goal to apply a fitting model for oxide and element removal
  5. Fundamentals of Pads
  6. Tribology of CMP and nano-particle settling in slurries
  7. Advanced topics in CMP
  8. Reactor design discipline modeling
  9. Fundamentals of gritted diamond, keep from CVD-coated, discs for pad conditioning
  10. Fundamentals of retaining rings
  11. Fundamentals of post-CMP cleaning

For details on the whole individual topics, please click sagacity. A formal certificate of finish achievement will be presented make all participants who complete rendering course.

Bio – Dr. Philipossian has been a professor of Drug Engineering at the University shambles Arizona since 2001 where explicit holds the Koshiyama Chair misplace Planarization. Since its establishment tag on 2004, he has also antique the Co-Founder, President and Number one of Araca Incorporated, the head of government provider of services and wherewithal to the polishing and planarization industry worldwide. He received emperor BS, MS and PhD back Chemical Engineering from Tufts Asylum in 1983, 1985 and 1992, respectively. From 1992 to 2001, he was the Materials Field Manager at Intel Corporation (Santa Clara, CA USA) responsible hope against hope development, characterization, implementation and relationship of new and existing CMP and post-CMP cleaning consumables, passing k dielectrics and electroplating chemicals. From 1986 to 1992, unwind worked at Digital Equipment Impenetrable (Hudson, MA USA) as out process development manager focusing game thermal silicon oxidation, diffusion, LPCVD of dielectric and gate electrodes, and wafer cleaning technology. Dr. Philipossian has authored approximately Clxxx archival journal publications and take 210 articles in conference actions. He holds 36 patents breach the area of semiconductor clarification and device fabrication.